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Royce Equipment: Karl Suss MA6 Mask Aligner

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Royce Equipment: Suss MA6 Mask Aligner for UV lithography. The MA/BA6 is used for MEMS applications, production of optical components and compound semiconductors with thick photo resists, high resolution and optimal edge illumination. Part of the Cambridge Henry Royce Institute. Please liaise with the primary contact to discuss and arrange access.

Contact De Volder, Michael Franciscus Lucas mfld2@cam.ac.uk +441223338176

Issues with this record should be reported to equipment_sharing@admin.cam.ac.uk