The FIB-SIMS instrument is used to image surfaces at a nano-scale lateral resolution, sub 100 nm. It is an ion microscope with a secondary ion detector (SIMS) giving compositional information on the surface in form of elemental maps, mass spectra and elemental concentration depth profiles. The FIB primary ion beam can be focused to an ultimate spot size of a 7 nm for imaging surfaces with secondary electrons. For high doses the effect of the FIB primary ion beam is to sputter the surface with great precision enabling, for example, thin sections that are electron transparent to be produced for transmission electron microscopy or highly smooth sections through microscopic features such as a crack tip. Samples must be vacuum compatible.
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