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Plassys MEB 550S Electron Beam Evaporator

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Eight crucibles with Au, Pd, Al, Mo, Ni, NiCr, Ti, Ge Suitable for substrates up to 150 mm Cryo pumped load lock and main chamber 10 kW electron beam source Load lock chamber Ion gun for substrate cleaning and etching Substrate tilt Full computer control
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@ glasgow.ac.uk

Issues with this record should be reported to Linsey.Robertson@glasgow.ac.uk