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RIE Plasma Etcher 200

More information.

Reactive Ion Etching system for Oxygen plasma treatment and Si etching
Part of Organization: Royal School Of Mines

Contact Dr Peter Petrov p.petrov@imperial.ac.uk

Contact Dr Cora O'Reilly c.oreilly@imperial.ac.uk

Issues with this record should be reported to g.robinson@imperial.ac.uk