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Scanning Electron Microscope

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High resolution field emission gun scanning electron microscope (FEGSEM), which provides the ability to visualize surface features of material down to 1 nanometre resolution. The instrument also includes an energy dispersive X-ray spectroscopy system (EDS/EDX) for chemical analysis and an electron backscattering diffraction system (EBSD) which allows for high speed collection of crystallographic data from sample surfaces. Furthermore, a variable pressure sample chamber enables non-conducting specimens to be observed without coating.

Instrument Features

  • Energy dispersive X-ray spectroscopy (EDS) using Oxford Instruments X-Max 80mm2 Detector
  • Electron backscattering diffraction detector (EBSD) with HKLNordlys F high speed Camera
  • Fore-scatter detectors (FSD)
  • Back-scattered detector (QBSD)
  • Inlens annular detector
  • Variable Pressure Mode
  • Oxford Instruments Aztec EDS/EBSD microanalysis software with TrueMap capability.

Model: 1530 VP

Manufacturer: Carl Zeiss (Leo)



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