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Hitachi S4700

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Field emission electron source 1.5 nm image resolution at 15 keV Substrates up to 150 mm diameter Accelerating voltages from 0.5 to 30 keV in 100 eV steps Eucentric 5 axis motorised stage Turbomolecular pumped column and sample chamber High resolution back scattered detector CD measurement and EDX analysis tools
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@

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