Equipment.Data Logo

Veeco Dektak 6M Height Profiler

More information.

Substrates up to 150 mm diameter Vertical resolution 0.1 nm at 6.5 k(nm) range Stylus force from 1 mg to 15 mg Stylus tip radius of 12.5 µm and 2.5 µm Z height capability of 1 mm x-y stage translation of 20 mm x 80 mm Up to 30,000 data points per scan
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@

Issues with this record should be reported to