Substrates up to 150 mm diameter
Vertical resolution 0.1 nm at 6.5 k(nm) range
Stylus force from 1 mg to 15 mg
Stylus tip radius of 12.5 µm and 2.5 µm
Z height capability of 1 mm
x-y stage translation of 20 mm x 80 mm
Up to 30,000 data points per scan
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