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Plassys MP 600S Confocal Sputter Tool

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Interchangable targets for Nb-based superconductors Suitable for samples up to 150 mm Cryopumped and turbo pumped main chamber Turbo pumped load lock 6 confocal magnetron sputter sources Substrate heater to 800 oC and rotating substrate DC and rf power supplies with simultaneous operation Ar, O2, N2 and CF4 gas lines with mass flow controllers Full computer control
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@ glasgow.ac.uk

Issues with this record should be reported to Linsey.Robertson@glasgow.ac.uk