Equipment.Data Logo

Surface Engineering Laboratory

A suite of magnetron sputtering rigs, with magnetrons ranging from 75mm in diameter up to 300mm x 100mm. Several rigs are equipped with multiple magnetrons and reactive process control. The rigs are suitable for the deposition of a wide range of metals, alloys, ceramics and multi-layer coatings onto substrates from a few mm in size up to several hundred sq cm.

Contact Prof Peter Kelly Peter.kelly@mmu.ac.uk

Issues with this record should be reported to Justin.Smith@mmu.ac.uk