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Oxford Instruments System 100 ICP 180 PECVD

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A high density plasma tool with load-lock mainly used room temperature deposition of low stress Si3N4. 5 nm thick films have a breakdown voltage of 4 x 106 V/cm. Gases: SiH4, N2O, N2, Ar, He, O2, CF4&O2
Part of Organization: James Watt Building

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