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Sputterer DORIS In-house

4x planar magnetron sputter coater (target size 345x145mm), sputtering horizontally. The substrates are mounted on an 8-station carousel and can be mounted on a flat holder (Approx 150x150mm) or rotated in front of the flux. The system is fully automated allowing complex deposition recipes with pulsed-DC power supplies. Substrate bias and glow discharge cleaning are installed.
Part of Organization: Cranfield Uni


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