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Oxygen Barrel Ashers

More information.

JWNC has 2 oxygen barrel ashers including a Gala Instruments Plasmaprep 5 asher, that are mainly used after lithography to remove residual layers of resist prior to etching or metallisation.
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@ glasgow.ac.uk

Issues with this record should be reported to Linsey.Robertson@glasgow.ac.uk