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EB-PVD Evaporator EBE-150 Von Ardenne

150kW electron beam system capable of evaporating three sources individually or sequentially at substrate temperatures of up to 1050°C. The process can be carried out under vacuum or with process gas. Up to 4x turbine blades or 4x substrate holders can be coated simultaneously with controlled rotation speeds and positions above the source.
Part of Organization: Cranfield Uni


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