The foundation of the facility is a Class 100 and Class 1000 cleanroom suite used for sample preparation and lithography, including equipment for resist processing, thin-film deposition, and etching. We provide training for researchers to use our electron beam lithography, focused ion beam lithography, and UV photolithography systems. Users can also access scanning electron microscopes and carry out elemental microanalysis within the facility.
If your search on our database results in an equipment or facilities collaboration we'd like to hear about it, all feedback on both successes and challenges will help us in enabling more partnerships. Click on the feedback tab.