A resolution of 0.19 nm, an electron probe size down to 0.5 nm and a maximum specimen tilt of 10 degrees along both axes. Equipped with an Oxford Instruments LZ5 windowless energy dispersive X-ray spectrometer (EDS) controlled by INCA. Has a bottom mounted Gatan Orius CCD (size around 2.5 k by 2.5 k).
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