150 m² of cleanroom space, class 10,000.
* Measurement Suite: 236 Source measure unit, 2410 HV Digital Sourcemeter, 2420 HC Digital sourcemeter,590 CV Analyser,2361 Trigger control unit, 7001 80 CH Switching system with installed 7065 Hall Effect Card.
* Metal Deposition: Eurocoater thermal evaporator and the EBS-1800 e-beam deposition equipment.
* Yellow Area for Photolithography: Quintel Q4000-6 Mask Aligner.
* Reactive Ion Etching: Plasmalab RIE-80 Plus.
* Plasma Enhanced Chemical Vapour Deposition (PECVD): Plasmalab DP-80 Plus.
* Wafer Microscope: Olympus BX51 reflective microscope.
* Rapid Thermal Annealing system: Jipelec Jetfirst Rapid Thermal Annealing Processor.
If your search on our database results in an equipment or facilities collaboration we'd like to hear about it, all feedback on both successes and challenges will help us in enabling more partnerships. Click on the feedback tab.