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BP80 RIE

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This is an open loaded RIE tool running fluorine chemistry for etching insulators. Gases: CHF3, SF6, C2F6, N2, O2, H2, Materials etched: SiO2, Si3N4, quartz, Si
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@ glasgow.ac.uk

Issues with this record should be reported to Linsey.Robertson@glasgow.ac.uk