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Zeiss NVision 40 FIB-SEM

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Combines a high resolution SEM to the precision milling and nanofabrication abilities of a high resolution FIB. The SEM has resolutions of 1.1 nm at 20 kV and 2.5 nm at 1 kV. The resolution of the ion beam is 4 nm at 1 pA.

Contact Neil Young neil.young@materials.ox.ac.uk

Issues with this record should be reported to research.facilities@admin.ox.ac.uk