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FEI Nova NanoSEM 630

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Schottky field emitter with up to 100 nA 150 mm x 150 mm piezo driven stage Substrates up to 200mm can be loaded Ultra high resolution imaging under high and low vacuum High vacuum 1.0 nm @ 15kV and Low Vacuum 1.8 nm @ 3kV Non conducting substrates can be imaged without coatings Electrostatic beam blanker and ebl capability Several detectors including TLD, ETD, Helix, VCD, GAD Integrated CCD in chamber camera
Part of Organization: James Watt Building

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