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Zeiss AURIGA FIB-SEM

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Combines a high resolution SEM to the precision milling and nanofabrication abilities of a high resolution FIB. The SEM has resolutions of 1.0 nm at 15 kV and 1.9 nm at 1 kV. The FIB column operates with a range of ion beam currents between 1 pA and 20 nA. It also has the capability of imaging to 2.5 nm resolution.

Contact Neil Young neil.young@materials.ox.ac.uk

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