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Suss Microtec MA6

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Maximum substrate size of 150 mm For samples below 75 mm: hard and vacuum contact modes For samples of 100 mm and above: proximity, hard and vacuum contact modes Top and back side alignment 350 W Hg lamp UV400 optics and i-line filters Motorised stage and focus Exposure controller for single or multiple exposures Chucks for bond alignment and silicon fusion applications
Part of Organization: James Watt Building

Contact Professor Douglas Paul Douglas.Paul@

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