Equipment.Data Logo

Equipment from

Homepage: http://www.gla.ac.uk

Contact: mailto:Linsey.Robertson@glasgow.ac.uk

Corrections: mailto:Linsey.Robertson@glasgow.ac.uk

Dataset source: http://web.eng.gla.ac.uk/jwnc/JWNC_database_spreadsheet.xlsx

Dataset format: http://equipment.data.ac.uk/uniquip

Dataset license:

Last import: Wed, 13 Dec 2017 00:09:35 +0000

Records count:

Local URI: http://id.equipment.data.ac.uk/item/0159e601450a0130926cf256241f85e5
Local ID: 0159e601450a0130926cf256241f85e5
Type: equipment
Name: Jipelec JetFirst Rapid Thermal Annealler (RTA)
Description: RTA annealling up to 1200 oC at ramp rates up to 300 oC/s in nitrogen gas. The system can process wafers up to 150 mm.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/021fb42b48686201d535cc502d913800
Local ID: 021fb42b48686201d535cc502d913800
Type: equipment
Name: S-parameter Test: 220 GHz to 325 GHz
Description: Cascade Microtech M150 (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and OML Inc. VNA extenders.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/09658c8fcaea7f238e35dcf6efa35fe8
Local ID: 09658c8fcaea7f238e35dcf6efa35fe8
Type: equipment
Name: Oxford Instruments System 100 ICP 380 PECVD
Description: A 200 mm high density plasma tool with load-lock mainly used room temperature deposition of low stress Si3N4. 5 nm thick films have a breakdown voltage of 4 x 106 V/cm. The tool has arrived but is being installed and the process capability being developed. The tool is load locked on a cluster tool robot with direct access to ALD and chlorine chemistry ICP RIE by vacuum transfer. Gases: SiH4, N2O, N2, Ar, He, O2, CF4&O2
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/0a27f0e4cb34e47fa460cd75e8f3f264
Local ID: 0a27f0e4cb34e47fa460cd75e8f3f264
Type: equipment
Name: Mid and Near Infrared FTIR
Description: Bruker Vertex 70 Fourier Transfor Infra Red (FTIR) spectroscopy systems that allows power measurements, polarisation and spectra to be obtained between 900 nm and 18 µm.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/0a77f8a02e61d4c7ba2923d771539c4a
Local ID: 0a77f8a02e61d4c7ba2923d771539c4a
Type: equipment
Name: mm-wave and THz FTIR
Description: Two vacuum Bruker 66 vs Fourier Transfor Infra Red (FTIR) spectroscopy systems with a QMC liquid He cooled Si-bolometer and beam splitters that allow power measurements, polarisation and spectra to be obtained between 60 GHz and 18 THz (about 16 µm).
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/0abbc67b0d02e873646f005a2f24fc21
Local ID: 0abbc67b0d02e873646f005a2f24fc21
Type: equipment
Name: Hitachi S900
Description: Cold cathode field emission electron source 0.7 nm image resolution at 30 keV and 3 nm at 1 keV Magnification from x100 to x800,000 TEM sample stage allowing W = 5 mm x L = 10 mm x H = 2.5 mm samples Turbo pumped column and substrate chambers Secondary electron and backscatter detectors
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/0bd7cae898bccbd0660f104e8dfff82b
Local ID: 0bd7cae898bccbd0660f104e8dfff82b
Type: equipment
Name: Plassys MEB 550S Electron Beam Evaporator
Description: Eight crucibles with Au, Pd, Al, Mo, Ni, NiCr, Ti, Ge Suitable for substrates up to 150 mm Cryo pumped load lock and main chamber 10 kW electron beam source Load lock chamber Ion gun for substrate cleaning and etching Substrate tilt Full computer control
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/11c7ccba8173093fcdcfda20900a0f4e
Local ID: 11c7ccba8173093fcdcfda20900a0f4e
Type: equipment
Name: Oxford Instruments RIE80+
Description: An open loaded RIE tool with a 600 W rf generator, a heated stage and viewing port with interferometer to monitor the etch depth. Gases: SF6, CHF3, CF4, C2F6, N2, Ar, O2 Materials etched: SiO2, Si3N4, quartz, Si, Ge, SiGe
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/17c955e809c401fab8201bb67fe21b6f
Local ID: 17c955e809c401fab8201bb67fe21b6f
Type: equipment
Name: Oxford Instruments FlexAL Atomic Layer Deposition
Description: A 200 mm atomic layer deposition (ALD) tool with a plasma source and 400 oC heated stage. The tool has arrived but is being installed and the process capability being developed. The tool is load locked on a cluster tool robot with direct access to ICP PECVD and chlorine chemistry ICP RIE by vacuum transfer. Processes being developed: Al2O3, HfO2, ZrO2, TiN, TaN, WN, AlN, Pt
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/17f396a25ba3ec8ed686a51774606cc6
Local ID: 17f396a25ba3ec8ed686a51774606cc6
Type: equipment
Name: Optical Spectrum Analysers
Description: Rohde and Schwarz Q8384 and Agilent 86140B optical spectrum analysers with Femtochrome FR-103XL autocorrelator and high resolution Coherent optical spectrum analyser.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/21438b4f1c40c8e46c448505b6f27a0d
Local ID: 21438b4f1c40c8e46c448505b6f27a0d
Type: equipment
Name: STS ICP RIE
Description: A 150 mm high density plasma tool with load-lock mainly used for deep Si etching using the Bosch process. The tool is used for a range of MEMS, NEMS and silicon optoelectronic & nanoelectronic research. Gases: SF6, C4F8, N2, Ar, He, O2 Materials etched: Si and SOI (Bosch process, mixed process), Ge, SiGe
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/24c6249bab8bcac4d6744d40daf03f27
Local ID: 24c6249bab8bcac4d6744d40daf03f27
Type: equipment
Name: S-parameter Test: 140 GHz to 220 GHz
Description: Cascade Microtech M150 (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and OML Inc. VNA extenders.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/2aedfc4a93095a871f52f9012878f3d2
Local ID: 2aedfc4a93095a871f52f9012878f3d2
Type: equipment
Name: Edinburgh Instruments MTL3 TEA CO2 Pulsed Laser
Description: This laser delivers average power up to 50 W in ns pulses (up to 150 MJ per pulse) and is used for optical pumping at the CO2 wavelengths between 9.1 and 10.9 µm.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/2c4b8af2a4d08d69fd5accf901819167
Local ID: 2c4b8af2a4d08d69fd5accf901819167
Type: equipment
Name: Pritel UOC-3 Mode-locked Fibre Laser
Description: This is a turn key fibre laser designed for use as an ultrafast optical clock.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/2ca371acf38b218927eb065dca02c7c5
Local ID: 2ca371acf38b218927eb065dca02c7c5
Type: equipment
Name: Plassys MEB 400S Electron Beam Evaporator
Description: Eight 12cc crucibles with Ni, Pt, Al, NiCr, Au, Ge, Ti, Au metals Suitable for samples up to 100 mm Cryo pumped load lock and main chamber 10 kW electron beam source Substrate double planetary motion Full computer control
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/2d7934c61fa9886f3798ecdadff5dc2e
Local ID: 2d7934c61fa9886f3798ecdadff5dc2e
Type: equipment
Name: Oxford Instruments PlasmaPro System 100 ICP180 RIE
Description: These are load locked RIE tools with cooled / heated stages and viewing ports with interferometers to monitor the etch depth. An ICP source is used for high density plamas for deep etching of semiconductor materials. Details Gases: Cl2, BCl3, HBr, SiCl4, CH4, CF4, O2, N2, Ar, low flow O2, H2 Materials etched: III-V etching, GaAs, AlGaAs, InGaAs, InP, GaN, AlGaN, high-K, low damage nitride, Au, Pt, Pd, Al, Ti
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/2e1d687dd1e3f547779a00c4ce4de820
Local ID: 2e1d687dd1e3f547779a00c4ce4de820
Type: equipment
Name: Hitachi S4700
Description: Field emission electron source 1.5 nm image resolution at 15 keV Substrates up to 150 mm diameter Accelerating voltages from 0.5 to 30 keV in 100 eV steps Eucentric 5 axis motorised stage Turbomolecular pumped column and sample chamber High resolution back scattered detector CD measurement and EDX analysis tools
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/2ef79447b852bfe00e4d2f81fee63869
Local ID: 2ef79447b852bfe00e4d2f81fee63869
Type: equipment
Name: ET340
Description: This is an open loaded RIE tool for etching In containing materials using methane and hydrogen gases. Gases: CH4, H2, CHF3, C2F6, Ar, N2, O2, CF4&O2 Materials etched: III-V materials with In, InP, InGaAs, InGaAsP, AlInAs, GaN, CdTe, ZnSe, NiFe, Fe and Co
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/3203fd55965cee4f63de393342ced1b4
Local ID: 3203fd55965cee4f63de393342ced1b4
Type: equipment
Name: Deep Wedge Wire Bonder
Description: Used to make electrical connections between fabricated bonding pads on substrates and the outside world - e.g. leadless chip carriers (LCCs) or circuit boards.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/323f1ce87406d738b8664d4bd7f2af8e
Local ID: 323f1ce87406d738b8664d4bd7f2af8e
Type: equipment
Name: Vistec VB6 UHR EWF electron beam lithography tool
Description: Maximum substrate / wafer size of 200 mm Gaussian beam step and exposure writing strategy Thermal field emission gun with 50 keV and 100 keV operation Minimum spot size < 4 nm Demonstrated single lines down to < 5 nm using HSQ resist 0.46 nm rms layer-to-layer alignment Extra wide field of 1.3 mm at both 50 and 100 keV Laser interferometer stage with 0.62 nm resolution 50 MHz pattern generator Full automated alignment Multi-substrate load lock - we run up to 4000 hours of pattern writing per annum
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/3e3302432583fded3f7f3094909fd5d9
Local ID: 3e3302432583fded3f7f3094909fd5d9
Type: equipment
Name: RF Anechoic Chamber
Description: Glasgow has an anechioc chamber in a fully screened room with near field test capability from kHz up to 20 GHz.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/43b4f7c8407e3bf306aaf6b35314fb6b
Local ID: 43b4f7c8407e3bf306aaf6b35314fb6b
Type: equipment
Name: Veeco Dektak 6M Height Profiler
Description: Substrates up to 150 mm diameter Vertical resolution 0.1 nm at 6.5 k(nm) range Stylus force from 1 mg to 15 mg Stylus tip radius of 12.5 µm and 2.5 µm Z height capability of 1 mm x-y stage translation of 20 mm x 80 mm Up to 30,000 data points per scan
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/4a657b80ecbffb0c2740ca3239a5eca9
Local ID: 4a657b80ecbffb0c2740ca3239a5eca9
Type: equipment
Name: Oxford Instruments PECVD 80+
Description: This is an open loaded PECVD tool configure to deposit Si3N4 at up to 300 oC. Gases: SiH4, N2O, N2, NH3, Ar, He, O2, CF4&O2
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/4a66052bf51096dd99fa30194fc6be99
Local ID: 4a66052bf51096dd99fa30194fc6be99
Type: equipment
Name: Plassys MP 900S Sputter Tool
Description: Interchangable targets with Ni, Pt, Al, NiCr, Au, Ge, Ti, TaN metals Suitable for samples up to 100 mm Turbo pumped load lock and main chamber 6 magnetron height adjustable cathodes each with screen and pneumatic shutter Substrate double planetary motion 3 off 1.5 kW DC and 3 off 1.0 kW rf power supplies with simultaneous operation Ar, O2 and N2 gas lines with mass flow controllers Full computer control
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/4dab7ecf82f5e2008c38b7ab7618cc2d
Local ID: 4dab7ecf82f5e2008c38b7ab7618cc2d
Type: equipment
Name: Passive Optical Waveguide Testing
Description: Photonics Tunics-PR and Agilent 8164A tunable lasers. Coherent OPA 9400 optical parametric amplifier. Ti-Sa and Nd-YAG lasers.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/54c110269757bf8f54de7696e188ab17
Local ID: 54c110269757bf8f54de7696e188ab17
Type: equipment
Name: RF Spectrum Analysers
Description: Rohde and Schwarz FSV40 and HP 8564E RF spectrum analysers.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/5573ed2a8451431be6dc5ea6276e170a
Local ID: 5573ed2a8451431be6dc5ea6276e170a
Type: equipment
Name: Agilent 8703A Lightwave Component Analyser
Description: Calibrated frequency response from 300 kHz to 20 GHz modulation frequency for 1300 nm and 1550 nm wavelength operation. 50 dB optical dynamic range.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/59ec45f9223934c8a255fe10e8a473fc
Local ID: 59ec45f9223934c8a255fe10e8a473fc
Type: equipment
Name: Manual Thermal Evaporator
Description: Manual operation Diffusion pumped bell jar 6 thermal sources with ceramic and tungsten boat
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/5c7e4f770e9ab895dbfdfb87d8bd93f9
Local ID: 5c7e4f770e9ab895dbfdfb87d8bd93f9
Type: equipment
Name: Optical Microscopes
Description: Optical microscopy typically has resolving power to about 0.2 µm and is used extensively in micro and nanofabrication. In the JWNC we use several different types of optical microscopy including light field, dark field and Normaski. Microscopes used include a Leica NM20 and a Zeiss Axiotron with image capture facilities.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/68946c8e3b3577a13c735aff287d7300
Local ID: 68946c8e3b3577a13c735aff287d7300
Type: equipment
Name: Resist Spinners
Description: The JWNC has five Headway programmable spinners used for applying a range of resist films to substrates up to eight inch wafers.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/6ccb5f35c6c38f4eebb0ff5a5ec55027
Local ID: 6ccb5f35c6c38f4eebb0ff5a5ec55027
Type: equipment
Name: Vistec EBPG5 HR 100 electron beam lithography tool
Description: Maximum substrate / wafer size of 150 mm Gaussian beam step and exposure writing strategy LaB6 filament and 20 keV, 50 keV and 100 keV operation 10 MHz pattern generator Writing field sizes of 560 x 560 µm at 100 keV and 800 x 800 µm at 50 keV Laser interferometer stage with 5 nm resolution Multi-substrate load lock
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/6d6b6dd5a7730af4edbba7670132c79f
Local ID: 6d6b6dd5a7730af4edbba7670132c79f
Type: equipment
Name: Plassys MP 600S Confocal Sputter Tool
Description: Interchangable targets for Nb-based superconductors Suitable for samples up to 150 mm Cryopumped and turbo pumped main chamber Turbo pumped load lock 6 confocal magnetron sputter sources Substrate heater to 800 oC and rotating substrate DC and rf power supplies with simultaneous operation Ar, O2, N2 and CF4 gas lines with mass flow controllers Full computer control
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/71607b5b9f268ad386675a37621f7ed4
Local ID: 71607b5b9f268ad386675a37621f7ed4
Type: equipment
Name: Veeco Dimension 3100 Atomic Force Microscope (AFM)
Description: Substrates up to 150 mm diameter and 12 mm thick Z-range of 6 µm x-y imaging area of 90 µm Thermal AFM temperature measurement capability
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/72f38b42b168a0e71c6e8695cfcb12a4
Local ID: 72f38b42b168a0e71c6e8695cfcb12a4
Type: equipment
Name: Plassys MEB 400 Evaporator
Description: Depositing passivation for diamond electronics Suitable for substrates up to 100 mm Full computer control
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/78e6557cd8afb5a0a5d5af1287dc77c1
Local ID: 78e6557cd8afb5a0a5d5af1287dc77c1
Type: equipment
Name: AVT PEO 601 Oxidation Furnace
Description: Capability to grow thermal SiO2 and SiOxN1-x up to 1100 oC at ramp rates up to 100 oC/min for a wafer batch or 20 oC/s for single wafers. The system can take 25 off 100 mm diameter wafers. Gases include O2, N2O, N2 and forming gas.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/798eeabe6e34da5225327e9ad8d066f0
Local ID: 798eeabe6e34da5225327e9ad8d066f0
Type: equipment
Name: Semiconductor Parameter Test with Integrated CV
Description: The Cascade Microtech Microchamber (up to 150 mm substrate capability) also has an Agilent B1500A Semiconductor Parameter Test system with integrated CV test card and variable duty-cycle pulsed measurement capability down to 10 ns. There are also 3 older HP Semiconductor Parameter Analysers with a range of probe stations for dc characterisation.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/7def74e3255092633496a89c7510112c
Local ID: 7def74e3255092633496a89c7510112c
Type: equipment
Name: Oxford Instruments System 100 ICP 180 PECVD
Description: A high density plasma tool with load-lock mainly used room temperature deposition of low stress Si3N4. 5 nm thick films have a breakdown voltage of 4 x 106 V/cm. Gases: SiH4, N2O, N2, Ar, He, O2, CF4&O2
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/7ea63cb6b173f5a47791932b1788dbe5
Local ID: 7ea63cb6b173f5a47791932b1788dbe5
Type: equipment
Name: Oxygen Barrel Ashers
Description: JWNC has 2 oxygen barrel ashers including a Gala Instruments Plasmaprep 5 asher, that are mainly used after lithography to remove residual layers of resist prior to etching or metallisation.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/7fb3d5f8329e9ea9f97b5b88ade0183c
Local ID: 7fb3d5f8329e9ea9f97b5b88ade0183c
Type: equipment
Name: Transmission Electron Microscopes (TEMs)
Description: We have a long standing collaborations with the School of Physics and Astronomy who have a range of TEM tools including EELS and EDX capability as well as a dual beam SEM / focussed-ion beam system for sample cross sectioning and preparation. Commercial access to the facility is available through the Kelvin Nanocharacterisation Centre.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/80f7a571a1a4013544dea57df622c3ab
Local ID: 80f7a571a1a4013544dea57df622c3ab
Type: equipment
Name: Oxford Instruments PlasmaPro System 100 ICP Cobra RIE
Description: A 200 mm load locked RIE tools with cooled / heated stages and viewing ports with interferometers to monitor the etch depth. An ICP source is used for high density plamas for deep etching of semiconductor materials. The tool has arrived but is being installed and the process capability being developed. The tool is load locked on a cluster tool robot with direct access to ALD and ICP PECVD by vacuum transfer. Gases: Cl2, BCl3, HBr, SiCl4, CH4, CF4, N2, Ar, O2, low flow O2, H2 Materials etched: III-V etching, GaAs, AlGaAs, InGaAs, InP, GaN, AlGaN, high-K, low damage nitride, Au, Pt, Pd, Al, Ti
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/81aea6c15129c31dad79f3cdd8e4092e
Local ID: 81aea6c15129c31dad79f3cdd8e4092e
Type: equipment
Name: Wet oxidation
Description: 3 quartz furnace tubes with 2 inch capability for wet oxidation.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/854832239a67d8cf81509fb15e88605a
Local ID: 854832239a67d8cf81509fb15e88605a
Type: equipment
Name: Hitachi S3000
Description: Pre -centred tungsten hairpin filament 3.5 nm image resolution at 25keV Substrates up to 150 mm diameter Accelerating voltage 0.3 to 30 keV 5 axis manual stage operation Diffusion pumped column and sample chamber
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/97ae302e8ffbfba08214279481c28f59
Local ID: 97ae302e8ffbfba08214279481c28f59
Type: equipment
Name: Ellipsometer
Description: Used to establish the thickness, index, loss index and roughness of thin films.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/9bb247228ff26eccd519599e2c1229e8
Local ID: 9bb247228ff26eccd519599e2c1229e8
Type: equipment
Name: Wet Etching
Description: We have a significant number of fume cupboards and laminar flow cupboards allowing a large range of chemical etching and cleaning including HF, KOH reflux, RCA and many III-V etches.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/a2535e1dadcb596d74446b9cd1349160
Local ID: a2535e1dadcb596d74446b9cd1349160
Type: equipment
Name: Engel Victory Tech 28 Injection Molder
Description: The injection mold system allows 3D patterns with features down to 20 nm to be injection molded. The masters are produced in the JWNC clean room using electron beam lithography and dry etch before being placed into the tool and use to produce many duplicate components in plastic or polymer materials. This technology is being used to research manufacturable nanoscale and nanotechnology based applications in biotechnology, lab-on-a-chip and healthcare.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/a289c635dbee4eee905deab7c6eae940
Local ID: a289c635dbee4eee905deab7c6eae940
Type: equipment
Name: mm-wave and THz FTIR
Description: Two vacuum Bruker 66 vs Fourier Transfor Infra Red (FTIR) spectroscopy systems with a QMC liquid He cooled Si-bolometer and beam splitters that allow power measurements, polarisation and spectra to be obtained between 60 GHz and 18 THz (about 16 µm).
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/ab7a2ae114980323c091bef58d20a2fd
Local ID: ab7a2ae114980323c091bef58d20a2fd
Type: equipment
Name: BP80 RIE
Description: This is an open loaded RIE tool running fluorine chemistry for etching insulators. Gases: CHF3, SF6, C2F6, N2, O2, H2, Materials etched: SiO2, Si3N4, quartz, Si
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/ac43ec82dd6056b986ee23a1a0296286
Local ID: ac43ec82dd6056b986ee23a1a0296286
Type: equipment
Name: Baltec CPD400 Critical Point Dryer
Description: Critical point drying is particularly useful when developing high aspect ratio resist patterns. These are easily damaged by conventional blow drying techniques and from surface tension forces which are at the phase boundary as liquid evaporates.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/ae69b3a20d1ad862be89e612f47049bb
Local ID: ae69b3a20d1ad862be89e612f47049bb
Type: equipment
Name: Obducat NIL 2.5 Nanoimprinter
Description: We have over 20 years experience of nanoimprint lithography, first using a manual press before commercial tools became available. We now have an Obducat tool which allows samples up to 65 mm to be processed. The system has demonstrated features down to 20 nm and has a 250 oC stage and pneumatic press that can operate up to 70 bar (but normally used at 20 bar). We have significant experience making stamps for the nanoimprinter and Kelvin Nanotechnology also offer stamps up to 200 mm diameter as a commercial service.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/b0cde71f26a76c7d8efda3e114e94930
Local ID: b0cde71f26a76c7d8efda3e114e94930
Type: equipment
Name: Edinburgh Instruments Far Infrared Laser
Description: This laser delivers CW output between 0.25 and 7.5 THz with output powers up to 180 mW at 2.54 THz (the power is dependent on the molecular line being used).
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/b1688e14d88a8c06e9ed90a3f6fa2aa6
Local ID: b1688e14d88a8c06e9ed90a3f6fa2aa6
Type: facility
Name: James Watt Nanofabrication Centre
Description: The James Watt Nanofabrication Centre (JWNC) was built in 2005 to house all the micro- and nano-fabrication facilities at the University of Glasgow in a single clean room. The clean room is part of the College of Science and Engineering in the University of Glasgow and is run by the School of Engineering (formerly the Department of Electronics and Electrical Engineering). Glasgow constructed its first electron beam lithography system by converting a SEM in 1978 and took delivery of the first commercial electron beam lithography tool in any UK university in 1990. We have over 30 years experience of delivering micro- and nano-fabrication that includes many world firsts and world records. Our experience and expertise covers applications in areas such as healthcare, security & defence, cleantech & sustainable energy and electronics. We have funded research covering the areas of nanofabrication, nanotechnology, nanoelectronics, microsystems, optoelectronics, photonics, Si photonics, bioengineering, biotechnology, lab-on-a-chip, microfluidics, MEMS, mm-wave & terahertz, thermoelectrics, photovoltaics, scanning probe microscopy and magnetics. Glasgow has undertaken micro- and nano-fabrication for over 100 universities world wide (including many EC programmes) and over 200 international companies. We are always happy to discuss new collaborations or commercial business. The fabrication facilities of the centre are also available as part of the EPSRC III-V National Facility. Kelvin Nanotechnology Ltd. provides commercial access to the centre facilities and expertise for industry, governments, institutes and also universities.
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/bcb529ecb38ac4e1d7daee450ac66100
Local ID: bcb529ecb38ac4e1d7daee450ac66100
Type: equipment
Name: Logitech Orbis Chemical Mechanical Polisher
Description: Able to undertake CMP on wafers with up to 200 mm diameter.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/beaef7ad597d55ecb0b56c55e78bbd55
Local ID: beaef7ad597d55ecb0b56c55e78bbd55
Type: equipment
Name: Laminar air flow cabinets
Description: The JWNC has 32 laminar air flow cabinets (LAF), each dedicated to specific activities. Similar activities are carried out within the same laboratory - for example resist spinning, aqueous processing and mixed aqueous and organic processing.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/c164131a475410bcfe9bcfdb3ee321a9
Local ID: c164131a475410bcfe9bcfdb3ee321a9
Type: equipment
Name: M Squared Lasers Sprite 30 fs, 800 mW Ti:Sa Laser
Description: This turn-key mode-locked Ti:Sa laser operating at 800 nm that provides 30 fs pulses at 100 MHz with average output powers of 800 mW. The system is set up in a time domain system using non-linear crystals and photoconductive antenna to allow THz spectroscopy between 60 GHz and 5 THz. The system is being used for gain measurements of THz quantum cascade lasers.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/cd364035256e9f321275dd5c532cc186
Local ID: cd364035256e9f321275dd5c532cc186
Type: equipment
Name: Oxford Instruments RIE100 (x2)
Description: These are load locked RIE tools with cooled / heated stages and viewing ports with interferometers to monitor the etch depth. Gases: SiCl4, CHF3, SF6, SiF4, C2F6, N2, Ar, O2, H2, Materials etched: III-V etching, GaAs, AlGaAs, GaN, AlGaN, high-K, low damage nitride, Au, Pt, Pd, Al, Ti
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/ce651c7fd3cb1446c9bab1da8e83f3a6
Local ID: ce651c7fd3cb1446c9bab1da8e83f3a6
Type: equipment
Name: Oxford Instruments PECVD 80+ (2)
Description: This is an open loaded PECVD tool configure to deposit SiO2 at up to 700 oC. Gases: SiH4, N2O, N2, NH3, Ar, He, O2, CF4&O2
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/d322f3bd2f2493231718ced671ee1ffd
Local ID: d322f3bd2f2493231718ced671ee1ffd
Type: equipment
Name: FEI Nova NanoSEM 630
Description: Schottky field emitter with up to 100 nA 150 mm x 150 mm piezo driven stage Substrates up to 200mm can be loaded Ultra high resolution imaging under high and low vacuum High vacuum 1.0 nm @ 15kV and Low Vacuum 1.8 nm @ 3kV Non conducting substrates can be imaged without coatings Electrostatic beam blanker and ebl capability Several detectors including TLD, ETD, Helix, VCD, GAD Integrated CCD in chamber camera
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/d5573065c5f237b334260d76a074f8aa
Local ID: d5573065c5f237b334260d76a074f8aa
Type: equipment
Name: Oxford Instruments Estelas 100 ICP RIE Deep Silicon Etch Tool
Description: A 200 mm high density plasma tool with load-lock mainly used for deep Si etching using the Bosch process with silicon etch rates up to 30 µm/min. The tool is used for a range of MEMS, NEMS and silicon optoelectronic & nanoelectronic research. Gases: SF6, C4F8, N2, Ar, He, O2 Materials etched: Si and SOI (Bosch process, mixed process), Ge, SiGe
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/e145db900ece0dfc8ef183dc1ee164a0
Local ID: e145db900ece0dfc8ef183dc1ee164a0
Type: equipment
Name: Suss Microtec MA6
Description: Maximum substrate size of 150 mm For samples below 75 mm: hard and vacuum contact modes For samples of 100 mm and above: proximity, hard and vacuum contact modes Top and back side alignment 350 W Hg lamp UV400 optics and i-line filters Motorised stage and focus Exposure controller for single or multiple exposures Chucks for bond alignment and silicon fusion applications
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/e567e2ac9316a4e42b5f324bec28d60a
Local ID: e567e2ac9316a4e42b5f324bec28d60a
Type: equipment
Name: 10 GB/s and 40 GB/s Telecomm Testing Systems2 Pulsed Laser
Description: Bit Error Rate Test: Advantest D3286 error detector with a D3186 pulse pattern generator.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/e5c4ac8da6d7e694b5b8d1161be7a7e1
Local ID: e5c4ac8da6d7e694b5b8d1161be7a7e1
Type: equipment
Name: Vacuum hot plates and ovens
Description: Vacuum hot plates, surface thermomenters and ovens are important for the application of resists and the development of resist patterns. This is particularly true for chemically amplified resists which commonly require a carefully controlled post exposure bake.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/ee2da122c3da76ba7666449d5a63d2dc
Local ID: ee2da122c3da76ba7666449d5a63d2dc
Type: equipment
Name: S-parameter Test: 10 MHz to 110 GHz
Description: Cascade Microtech Microchamber (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and Agilent VNA extenders. 100 kHz to 20 GHz Agilent analogue signal generators and oscilloscopes are available.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Local URI: http://id.equipment.data.ac.uk/item/fbff6b2bf0d44f891751a1988d81e56e
Local ID: fbff6b2bf0d44f891751a1988d81e56e
Type: equipment
Name: Wide Bandwidth Oscilloscopes
Description: Agilent DCA 86100C and Rohde and Schwarz RTO1012 wide bandwidth oscilloscopes.
Related Facility ID: James Watt Nanofabrication Centre
Location: http://en.wikipedia.org/wiki/Glasgow
Contact Name: Professor Douglas Paul
Contact Email: Douglas.Paul@ glasgow.ac.uk
Site Location: University of Glasgow, Gilmorehill Campus
Building: James Watt Building
Web Address: http://www.jwnc.gla.ac.uk
Institution Name: University of Glasgow
Institution URL: http://www.gla.ac.uk
Institution Logo URL: http://www.gla.ac.uk/0t4/generic/images/logo_print.gif
Datestamp: 2017-12-13T00:09:34+00:00
Approximate Coordinates: 55.858 -4.259
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk