Equipment from
Homepage: http://www.gla.ac.uk
Contact: mailto:Linsey.Robertson@glasgow.ac.uk
Corrections: mailto:Linsey.Robertson@glasgow.ac.uk
Dataset source: http://web.eng.gla.ac.uk/jwnc/JWNC_database_spreadsheet.xlsx
Dataset format: http://equipment.data.ac.uk/uniquip
Dataset license:
Last import: Sun, 16 Jun 2019 00:05:34 +0100
Records count:
| Local URI: | http://id.equipment.data.ac.uk/item/0159e601450a0130926cf256241f85e5 |
|---|---|
| Local ID: | 0159e601450a0130926cf256241f85e5 |
| Type: | equipment |
| Name: | Jipelec JetFirst Rapid Thermal Annealler (RTA) |
| Description: | RTA annealling up to 1200 oC at ramp rates up to 300 oC/s in nitrogen gas. The system can process wafers up to 150 mm. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/021fb42b48686201d535cc502d913800 |
|---|---|
| Local ID: | 021fb42b48686201d535cc502d913800 |
| Type: | equipment |
| Name: | S-parameter Test: 220 GHz to 325 GHz |
| Description: | Cascade Microtech M150 (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and OML Inc. VNA extenders. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/09658c8fcaea7f238e35dcf6efa35fe8 |
|---|---|
| Local ID: | 09658c8fcaea7f238e35dcf6efa35fe8 |
| Type: | equipment |
| Name: | Oxford Instruments System 100 ICP 380 PECVD |
| Description: | A 200 mm high density plasma tool with load-lock mainly used room temperature deposition of low stress Si3N4. 5 nm thick films have a breakdown voltage of 4 x 106 V/cm. The tool has arrived but is being installed and the process capability being developed. The tool is load locked on a cluster tool robot with direct access to ALD and chlorine chemistry ICP RIE by vacuum transfer. Gases: SiH4, N2O, N2, Ar, He, O2, CF4&O2 |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/0a27f0e4cb34e47fa460cd75e8f3f264 |
|---|---|
| Local ID: | 0a27f0e4cb34e47fa460cd75e8f3f264 |
| Type: | equipment |
| Name: | Mid and Near Infrared FTIR |
| Description: | Bruker Vertex 70 Fourier Transfor Infra Red (FTIR) spectroscopy systems that allows power measurements, polarisation and spectra to be obtained between 900 nm and 18 µm. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/0a77f8a02e61d4c7ba2923d771539c4a |
|---|---|
| Local ID: | 0a77f8a02e61d4c7ba2923d771539c4a |
| Type: | equipment |
| Name: | mm-wave and THz FTIR |
| Description: | Two vacuum Bruker 66 vs Fourier Transfor Infra Red (FTIR) spectroscopy systems with a QMC liquid He cooled Si-bolometer and beam splitters that allow power measurements, polarisation and spectra to be obtained between 60 GHz and 18 THz (about 16 µm). |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/0abbc67b0d02e873646f005a2f24fc21 |
|---|---|
| Local ID: | 0abbc67b0d02e873646f005a2f24fc21 |
| Type: | equipment |
| Name: | Hitachi S900 |
| Description: | Cold cathode field emission electron source 0.7 nm image resolution at 30 keV and 3 nm at 1 keV Magnification from x100 to x800,000 TEM sample stage allowing W = 5 mm x L = 10 mm x H = 2.5 mm samples Turbo pumped column and substrate chambers Secondary electron and backscatter detectors |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/0bd7cae898bccbd0660f104e8dfff82b |
|---|---|
| Local ID: | 0bd7cae898bccbd0660f104e8dfff82b |
| Type: | equipment |
| Name: | Plassys MEB 550S Electron Beam Evaporator |
| Description: | Eight crucibles with Au, Pd, Al, Mo, Ni, NiCr, Ti, Ge Suitable for substrates up to 150 mm Cryo pumped load lock and main chamber 10 kW electron beam source Load lock chamber Ion gun for substrate cleaning and etching Substrate tilt Full computer control |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/11c7ccba8173093fcdcfda20900a0f4e |
|---|---|
| Local ID: | 11c7ccba8173093fcdcfda20900a0f4e |
| Type: | equipment |
| Name: | Oxford Instruments RIE80+ |
| Description: | An open loaded RIE tool with a 600 W rf generator, a heated stage and viewing port with interferometer to monitor the etch depth. Gases: SF6, CHF3, CF4, C2F6, N2, Ar, O2 Materials etched: SiO2, Si3N4, quartz, Si, Ge, SiGe |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/17c955e809c401fab8201bb67fe21b6f |
|---|---|
| Local ID: | 17c955e809c401fab8201bb67fe21b6f |
| Type: | equipment |
| Name: | Oxford Instruments FlexAL Atomic Layer Deposition |
| Description: | A 200 mm atomic layer deposition (ALD) tool with a plasma source and 400 oC heated stage. The tool has arrived but is being installed and the process capability being developed. The tool is load locked on a cluster tool robot with direct access to ICP PECVD and chlorine chemistry ICP RIE by vacuum transfer. Processes being developed: Al2O3, HfO2, ZrO2, TiN, TaN, WN, AlN, Pt |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/17f396a25ba3ec8ed686a51774606cc6 |
|---|---|
| Local ID: | 17f396a25ba3ec8ed686a51774606cc6 |
| Type: | equipment |
| Name: | Optical Spectrum Analysers |
| Description: | Rohde and Schwarz Q8384 and Agilent 86140B optical spectrum analysers with Femtochrome FR-103XL autocorrelator and high resolution Coherent optical spectrum analyser. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/21438b4f1c40c8e46c448505b6f27a0d |
|---|---|
| Local ID: | 21438b4f1c40c8e46c448505b6f27a0d |
| Type: | equipment |
| Name: | STS ICP RIE |
| Description: | A 150 mm high density plasma tool with load-lock mainly used for deep Si etching using the Bosch process. The tool is used for a range of MEMS, NEMS and silicon optoelectronic & nanoelectronic research. Gases: SF6, C4F8, N2, Ar, He, O2 Materials etched: Si and SOI (Bosch process, mixed process), Ge, SiGe |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/24c6249bab8bcac4d6744d40daf03f27 |
|---|---|
| Local ID: | 24c6249bab8bcac4d6744d40daf03f27 |
| Type: | equipment |
| Name: | S-parameter Test: 140 GHz to 220 GHz |
| Description: | Cascade Microtech M150 (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and OML Inc. VNA extenders. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/2aedfc4a93095a871f52f9012878f3d2 |
|---|---|
| Local ID: | 2aedfc4a93095a871f52f9012878f3d2 |
| Type: | equipment |
| Name: | Edinburgh Instruments MTL3 TEA CO2 Pulsed Laser |
| Description: | This laser delivers average power up to 50 W in ns pulses (up to 150 MJ per pulse) and is used for optical pumping at the CO2 wavelengths between 9.1 and 10.9 µm. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/2c4b8af2a4d08d69fd5accf901819167 |
|---|---|
| Local ID: | 2c4b8af2a4d08d69fd5accf901819167 |
| Type: | equipment |
| Name: | Pritel UOC-3 Mode-locked Fibre Laser |
| Description: | This is a turn key fibre laser designed for use as an ultrafast optical clock. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/2ca371acf38b218927eb065dca02c7c5 |
|---|---|
| Local ID: | 2ca371acf38b218927eb065dca02c7c5 |
| Type: | equipment |
| Name: | Plassys MEB 400S Electron Beam Evaporator |
| Description: | Eight 12cc crucibles with Ni, Pt, Al, NiCr, Au, Ge, Ti, Au metals Suitable for samples up to 100 mm Cryo pumped load lock and main chamber 10 kW electron beam source Substrate double planetary motion Full computer control |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/2d7934c61fa9886f3798ecdadff5dc2e |
|---|---|
| Local ID: | 2d7934c61fa9886f3798ecdadff5dc2e |
| Type: | equipment |
| Name: | Oxford Instruments PlasmaPro System 100 ICP180 RIE |
| Description: | These are load locked RIE tools with cooled / heated stages and viewing ports with interferometers to monitor the etch depth. An ICP source is used for high density plamas for deep etching of semiconductor materials. Details Gases: Cl2, BCl3, HBr, SiCl4, CH4, CF4, O2, N2, Ar, low flow O2, H2 Materials etched: III-V etching, GaAs, AlGaAs, InGaAs, InP, GaN, AlGaN, high-K, low damage nitride, Au, Pt, Pd, Al, Ti |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/2e1d687dd1e3f547779a00c4ce4de820 |
|---|---|
| Local ID: | 2e1d687dd1e3f547779a00c4ce4de820 |
| Type: | equipment |
| Name: | Hitachi S4700 |
| Description: | Field emission electron source 1.5 nm image resolution at 15 keV Substrates up to 150 mm diameter Accelerating voltages from 0.5 to 30 keV in 100 eV steps Eucentric 5 axis motorised stage Turbomolecular pumped column and sample chamber High resolution back scattered detector CD measurement and EDX analysis tools |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/2ef79447b852bfe00e4d2f81fee63869 |
|---|---|
| Local ID: | 2ef79447b852bfe00e4d2f81fee63869 |
| Type: | equipment |
| Name: | ET340 |
| Description: | This is an open loaded RIE tool for etching In containing materials using methane and hydrogen gases. Gases: CH4, H2, CHF3, C2F6, Ar, N2, O2, CF4&O2 Materials etched: III-V materials with In, InP, InGaAs, InGaAsP, AlInAs, GaN, CdTe, ZnSe, NiFe, Fe and Co |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/3203fd55965cee4f63de393342ced1b4 |
|---|---|
| Local ID: | 3203fd55965cee4f63de393342ced1b4 |
| Type: | equipment |
| Name: | Deep Wedge Wire Bonder |
| Description: | Used to make electrical connections between fabricated bonding pads on substrates and the outside world - e.g. leadless chip carriers (LCCs) or circuit boards. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/323f1ce87406d738b8664d4bd7f2af8e |
|---|---|
| Local ID: | 323f1ce87406d738b8664d4bd7f2af8e |
| Type: | equipment |
| Name: | Vistec VB6 UHR EWF electron beam lithography tool |
| Description: | Maximum substrate / wafer size of 200 mm Gaussian beam step and exposure writing strategy Thermal field emission gun with 50 keV and 100 keV operation Minimum spot size < 4 nm Demonstrated single lines down to < 5 nm using HSQ resist 0.46 nm rms layer-to-layer alignment Extra wide field of 1.3 mm at both 50 and 100 keV Laser interferometer stage with 0.62 nm resolution 50 MHz pattern generator Full automated alignment Multi-substrate load lock - we run up to 4000 hours of pattern writing per annum |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/3e3302432583fded3f7f3094909fd5d9 |
|---|---|
| Local ID: | 3e3302432583fded3f7f3094909fd5d9 |
| Type: | equipment |
| Name: | RF Anechoic Chamber |
| Description: | Glasgow has an anechioc chamber in a fully screened room with near field test capability from kHz up to 20 GHz. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/43b4f7c8407e3bf306aaf6b35314fb6b |
|---|---|
| Local ID: | 43b4f7c8407e3bf306aaf6b35314fb6b |
| Type: | equipment |
| Name: | Veeco Dektak 6M Height Profiler |
| Description: | Substrates up to 150 mm diameter Vertical resolution 0.1 nm at 6.5 k(nm) range Stylus force from 1 mg to 15 mg Stylus tip radius of 12.5 µm and 2.5 µm Z height capability of 1 mm x-y stage translation of 20 mm x 80 mm Up to 30,000 data points per scan |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/4a657b80ecbffb0c2740ca3239a5eca9 |
|---|---|
| Local ID: | 4a657b80ecbffb0c2740ca3239a5eca9 |
| Type: | equipment |
| Name: | Oxford Instruments PECVD 80+ |
| Description: | This is an open loaded PECVD tool configure to deposit Si3N4 at up to 300 oC. Gases: SiH4, N2O, N2, NH3, Ar, He, O2, CF4&O2 |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/4a66052bf51096dd99fa30194fc6be99 |
|---|---|
| Local ID: | 4a66052bf51096dd99fa30194fc6be99 |
| Type: | equipment |
| Name: | Plassys MP 900S Sputter Tool |
| Description: | Interchangable targets with Ni, Pt, Al, NiCr, Au, Ge, Ti, TaN metals Suitable for samples up to 100 mm Turbo pumped load lock and main chamber 6 magnetron height adjustable cathodes each with screen and pneumatic shutter Substrate double planetary motion 3 off 1.5 kW DC and 3 off 1.0 kW rf power supplies with simultaneous operation Ar, O2 and N2 gas lines with mass flow controllers Full computer control |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/4dab7ecf82f5e2008c38b7ab7618cc2d |
|---|---|
| Local ID: | 4dab7ecf82f5e2008c38b7ab7618cc2d |
| Type: | equipment |
| Name: | Passive Optical Waveguide Testing |
| Description: | Photonics Tunics-PR and Agilent 8164A tunable lasers. Coherent OPA 9400 optical parametric amplifier. Ti-Sa and Nd-YAG lasers. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/54c110269757bf8f54de7696e188ab17 |
|---|---|
| Local ID: | 54c110269757bf8f54de7696e188ab17 |
| Type: | equipment |
| Name: | RF Spectrum Analysers |
| Description: | Rohde and Schwarz FSV40 and HP 8564E RF spectrum analysers. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/5573ed2a8451431be6dc5ea6276e170a |
|---|---|
| Local ID: | 5573ed2a8451431be6dc5ea6276e170a |
| Type: | equipment |
| Name: | Agilent 8703A Lightwave Component Analyser |
| Description: | Calibrated frequency response from 300 kHz to 20 GHz modulation frequency for 1300 nm and 1550 nm wavelength operation. 50 dB optical dynamic range. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/59ec45f9223934c8a255fe10e8a473fc |
|---|---|
| Local ID: | 59ec45f9223934c8a255fe10e8a473fc |
| Type: | equipment |
| Name: | Manual Thermal Evaporator |
| Description: | Manual operation Diffusion pumped bell jar 6 thermal sources with ceramic and tungsten boat |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/5c7e4f770e9ab895dbfdfb87d8bd93f9 |
|---|---|
| Local ID: | 5c7e4f770e9ab895dbfdfb87d8bd93f9 |
| Type: | equipment |
| Name: | Optical Microscopes |
| Description: | Optical microscopy typically has resolving power to about 0.2 µm and is used extensively in micro and nanofabrication. In the JWNC we use several different types of optical microscopy including light field, dark field and Normaski. Microscopes used include a Leica NM20 and a Zeiss Axiotron with image capture facilities. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/68946c8e3b3577a13c735aff287d7300 |
|---|---|
| Local ID: | 68946c8e3b3577a13c735aff287d7300 |
| Type: | equipment |
| Name: | Resist Spinners |
| Description: | The JWNC has five Headway programmable spinners used for applying a range of resist films to substrates up to eight inch wafers. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/6ccb5f35c6c38f4eebb0ff5a5ec55027 |
|---|---|
| Local ID: | 6ccb5f35c6c38f4eebb0ff5a5ec55027 |
| Type: | equipment |
| Name: | Vistec EBPG5 HR 100 electron beam lithography tool |
| Description: | Maximum substrate / wafer size of 150 mm Gaussian beam step and exposure writing strategy LaB6 filament and 20 keV, 50 keV and 100 keV operation 10 MHz pattern generator Writing field sizes of 560 x 560 µm at 100 keV and 800 x 800 µm at 50 keV Laser interferometer stage with 5 nm resolution Multi-substrate load lock |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/6d6b6dd5a7730af4edbba7670132c79f |
|---|---|
| Local ID: | 6d6b6dd5a7730af4edbba7670132c79f |
| Type: | equipment |
| Name: | Plassys MP 600S Confocal Sputter Tool |
| Description: | Interchangable targets for Nb-based superconductors Suitable for samples up to 150 mm Cryopumped and turbo pumped main chamber Turbo pumped load lock 6 confocal magnetron sputter sources Substrate heater to 800 oC and rotating substrate DC and rf power supplies with simultaneous operation Ar, O2, N2 and CF4 gas lines with mass flow controllers Full computer control |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/71607b5b9f268ad386675a37621f7ed4 |
|---|---|
| Local ID: | 71607b5b9f268ad386675a37621f7ed4 |
| Type: | equipment |
| Name: | Veeco Dimension 3100 Atomic Force Microscope (AFM) |
| Description: | Substrates up to 150 mm diameter and 12 mm thick Z-range of 6 µm x-y imaging area of 90 µm Thermal AFM temperature measurement capability |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/72f38b42b168a0e71c6e8695cfcb12a4 |
|---|---|
| Local ID: | 72f38b42b168a0e71c6e8695cfcb12a4 |
| Type: | equipment |
| Name: | Plassys MEB 400 Evaporator |
| Description: | Depositing passivation for diamond electronics Suitable for substrates up to 100 mm Full computer control |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/78e6557cd8afb5a0a5d5af1287dc77c1 |
|---|---|
| Local ID: | 78e6557cd8afb5a0a5d5af1287dc77c1 |
| Type: | equipment |
| Name: | AVT PEO 601 Oxidation Furnace |
| Description: | Capability to grow thermal SiO2 and SiOxN1-x up to 1100 oC at ramp rates up to 100 oC/min for a wafer batch or 20 oC/s for single wafers. The system can take 25 off 100 mm diameter wafers. Gases include O2, N2O, N2 and forming gas. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/798eeabe6e34da5225327e9ad8d066f0 |
|---|---|
| Local ID: | 798eeabe6e34da5225327e9ad8d066f0 |
| Type: | equipment |
| Name: | Semiconductor Parameter Test with Integrated CV |
| Description: | The Cascade Microtech Microchamber (up to 150 mm substrate capability) also has an Agilent B1500A Semiconductor Parameter Test system with integrated CV test card and variable duty-cycle pulsed measurement capability down to 10 ns. There are also 3 older HP Semiconductor Parameter Analysers with a range of probe stations for dc characterisation. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/7def74e3255092633496a89c7510112c |
|---|---|
| Local ID: | 7def74e3255092633496a89c7510112c |
| Type: | equipment |
| Name: | Oxford Instruments System 100 ICP 180 PECVD |
| Description: | A high density plasma tool with load-lock mainly used room temperature deposition of low stress Si3N4. 5 nm thick films have a breakdown voltage of 4 x 106 V/cm. Gases: SiH4, N2O, N2, Ar, He, O2, CF4&O2 |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/7ea63cb6b173f5a47791932b1788dbe5 |
|---|---|
| Local ID: | 7ea63cb6b173f5a47791932b1788dbe5 |
| Type: | equipment |
| Name: | Oxygen Barrel Ashers |
| Description: | JWNC has 2 oxygen barrel ashers including a Gala Instruments Plasmaprep 5 asher, that are mainly used after lithography to remove residual layers of resist prior to etching or metallisation. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/7fb3d5f8329e9ea9f97b5b88ade0183c |
|---|---|
| Local ID: | 7fb3d5f8329e9ea9f97b5b88ade0183c |
| Type: | equipment |
| Name: | Transmission Electron Microscopes (TEMs) |
| Description: | We have a long standing collaborations with the School of Physics and Astronomy who have a range of TEM tools including EELS and EDX capability as well as a dual beam SEM / focussed-ion beam system for sample cross sectioning and preparation. Commercial access to the facility is available through the Kelvin Nanocharacterisation Centre. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/80f7a571a1a4013544dea57df622c3ab |
|---|---|
| Local ID: | 80f7a571a1a4013544dea57df622c3ab |
| Type: | equipment |
| Name: | Oxford Instruments PlasmaPro System 100 ICP Cobra RIE |
| Description: | A 200 mm load locked RIE tools with cooled / heated stages and viewing ports with interferometers to monitor the etch depth. An ICP source is used for high density plamas for deep etching of semiconductor materials. The tool has arrived but is being installed and the process capability being developed. The tool is load locked on a cluster tool robot with direct access to ALD and ICP PECVD by vacuum transfer. Gases: Cl2, BCl3, HBr, SiCl4, CH4, CF4, N2, Ar, O2, low flow O2, H2 Materials etched: III-V etching, GaAs, AlGaAs, InGaAs, InP, GaN, AlGaN, high-K, low damage nitride, Au, Pt, Pd, Al, Ti |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/81aea6c15129c31dad79f3cdd8e4092e |
|---|---|
| Local ID: | 81aea6c15129c31dad79f3cdd8e4092e |
| Type: | equipment |
| Name: | Wet oxidation |
| Description: | 3 quartz furnace tubes with 2 inch capability for wet oxidation. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/854832239a67d8cf81509fb15e88605a |
|---|---|
| Local ID: | 854832239a67d8cf81509fb15e88605a |
| Type: | equipment |
| Name: | Hitachi S3000 |
| Description: | Pre -centred tungsten hairpin filament 3.5 nm image resolution at 25keV Substrates up to 150 mm diameter Accelerating voltage 0.3 to 30 keV 5 axis manual stage operation Diffusion pumped column and sample chamber |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/97ae302e8ffbfba08214279481c28f59 |
|---|---|
| Local ID: | 97ae302e8ffbfba08214279481c28f59 |
| Type: | equipment |
| Name: | Ellipsometer |
| Description: | Used to establish the thickness, index, loss index and roughness of thin films. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/9bb247228ff26eccd519599e2c1229e8 |
|---|---|
| Local ID: | 9bb247228ff26eccd519599e2c1229e8 |
| Type: | equipment |
| Name: | Wet Etching |
| Description: | We have a significant number of fume cupboards and laminar flow cupboards allowing a large range of chemical etching and cleaning including HF, KOH reflux, RCA and many III-V etches. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/a2535e1dadcb596d74446b9cd1349160 |
|---|---|
| Local ID: | a2535e1dadcb596d74446b9cd1349160 |
| Type: | equipment |
| Name: | Engel Victory Tech 28 Injection Molder |
| Description: | The injection mold system allows 3D patterns with features down to 20 nm to be injection molded. The masters are produced in the JWNC clean room using electron beam lithography and dry etch before being placed into the tool and use to produce many duplicate components in plastic or polymer materials. This technology is being used to research manufacturable nanoscale and nanotechnology based applications in biotechnology, lab-on-a-chip and healthcare. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/a289c635dbee4eee905deab7c6eae940 |
|---|---|
| Local ID: | a289c635dbee4eee905deab7c6eae940 |
| Type: | equipment |
| Name: | mm-wave and THz FTIR |
| Description: | Two vacuum Bruker 66 vs Fourier Transfor Infra Red (FTIR) spectroscopy systems with a QMC liquid He cooled Si-bolometer and beam splitters that allow power measurements, polarisation and spectra to be obtained between 60 GHz and 18 THz (about 16 µm). |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/ab7a2ae114980323c091bef58d20a2fd |
|---|---|
| Local ID: | ab7a2ae114980323c091bef58d20a2fd |
| Type: | equipment |
| Name: | BP80 RIE |
| Description: | This is an open loaded RIE tool running fluorine chemistry for etching insulators. Gases: CHF3, SF6, C2F6, N2, O2, H2, Materials etched: SiO2, Si3N4, quartz, Si |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/ac43ec82dd6056b986ee23a1a0296286 |
|---|---|
| Local ID: | ac43ec82dd6056b986ee23a1a0296286 |
| Type: | equipment |
| Name: | Baltec CPD400 Critical Point Dryer |
| Description: | Critical point drying is particularly useful when developing high aspect ratio resist patterns. These are easily damaged by conventional blow drying techniques and from surface tension forces which are at the phase boundary as liquid evaporates. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/ae69b3a20d1ad862be89e612f47049bb |
|---|---|
| Local ID: | ae69b3a20d1ad862be89e612f47049bb |
| Type: | equipment |
| Name: | Obducat NIL 2.5 Nanoimprinter |
| Description: | We have over 20 years experience of nanoimprint lithography, first using a manual press before commercial tools became available. We now have an Obducat tool which allows samples up to 65 mm to be processed. The system has demonstrated features down to 20 nm and has a 250 oC stage and pneumatic press that can operate up to 70 bar (but normally used at 20 bar). We have significant experience making stamps for the nanoimprinter and Kelvin Nanotechnology also offer stamps up to 200 mm diameter as a commercial service. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/b0cde71f26a76c7d8efda3e114e94930 |
|---|---|
| Local ID: | b0cde71f26a76c7d8efda3e114e94930 |
| Type: | equipment |
| Name: | Edinburgh Instruments Far Infrared Laser |
| Description: | This laser delivers CW output between 0.25 and 7.5 THz with output powers up to 180 mW at 2.54 THz (the power is dependent on the molecular line being used). |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/b1688e14d88a8c06e9ed90a3f6fa2aa6 |
|---|---|
| Local ID: | b1688e14d88a8c06e9ed90a3f6fa2aa6 |
| Type: | facility |
| Name: | James Watt Nanofabrication Centre |
| Description: | The James Watt Nanofabrication Centre (JWNC) was built in 2005 to house all the micro- and nano-fabrication facilities at the University of Glasgow in a single clean room. The clean room is part of the College of Science and Engineering in the University of Glasgow and is run by the School of Engineering (formerly the Department of Electronics and Electrical Engineering). Glasgow constructed its first electron beam lithography system by converting a SEM in 1978 and took delivery of the first commercial electron beam lithography tool in any UK university in 1990. We have over 30 years experience of delivering micro- and nano-fabrication that includes many world firsts and world records. Our experience and expertise covers applications in areas such as healthcare, security & defence, cleantech & sustainable energy and electronics. We have funded research covering the areas of nanofabrication, nanotechnology, nanoelectronics, microsystems, optoelectronics, photonics, Si photonics, bioengineering, biotechnology, lab-on-a-chip, microfluidics, MEMS, mm-wave & terahertz, thermoelectrics, photovoltaics, scanning probe microscopy and magnetics. Glasgow has undertaken micro- and nano-fabrication for over 100 universities world wide (including many EC programmes) and over 200 international companies. We are always happy to discuss new collaborations or commercial business. The fabrication facilities of the centre are also available as part of the EPSRC III-V National Facility. Kelvin Nanotechnology Ltd. provides commercial access to the centre facilities and expertise for industry, governments, institutes and also universities. |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/bcb529ecb38ac4e1d7daee450ac66100 |
|---|---|
| Local ID: | bcb529ecb38ac4e1d7daee450ac66100 |
| Type: | equipment |
| Name: | Logitech Orbis Chemical Mechanical Polisher |
| Description: | Able to undertake CMP on wafers with up to 200 mm diameter. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/beaef7ad597d55ecb0b56c55e78bbd55 |
|---|---|
| Local ID: | beaef7ad597d55ecb0b56c55e78bbd55 |
| Type: | equipment |
| Name: | Laminar air flow cabinets |
| Description: | The JWNC has 32 laminar air flow cabinets (LAF), each dedicated to specific activities. Similar activities are carried out within the same laboratory - for example resist spinning, aqueous processing and mixed aqueous and organic processing. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/c164131a475410bcfe9bcfdb3ee321a9 |
|---|---|
| Local ID: | c164131a475410bcfe9bcfdb3ee321a9 |
| Type: | equipment |
| Name: | M Squared Lasers Sprite 30 fs, 800 mW Ti:Sa Laser |
| Description: | This turn-key mode-locked Ti:Sa laser operating at 800 nm that provides 30 fs pulses at 100 MHz with average output powers of 800 mW. The system is set up in a time domain system using non-linear crystals and photoconductive antenna to allow THz spectroscopy between 60 GHz and 5 THz. The system is being used for gain measurements of THz quantum cascade lasers. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/cd364035256e9f321275dd5c532cc186 |
|---|---|
| Local ID: | cd364035256e9f321275dd5c532cc186 |
| Type: | equipment |
| Name: | Oxford Instruments RIE100 (x2) |
| Description: | These are load locked RIE tools with cooled / heated stages and viewing ports with interferometers to monitor the etch depth. Gases: SiCl4, CHF3, SF6, SiF4, C2F6, N2, Ar, O2, H2, Materials etched: III-V etching, GaAs, AlGaAs, GaN, AlGaN, high-K, low damage nitride, Au, Pt, Pd, Al, Ti |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/ce651c7fd3cb1446c9bab1da8e83f3a6 |
|---|---|
| Local ID: | ce651c7fd3cb1446c9bab1da8e83f3a6 |
| Type: | equipment |
| Name: | Oxford Instruments PECVD 80+ (2) |
| Description: | This is an open loaded PECVD tool configure to deposit SiO2 at up to 700 oC. Gases: SiH4, N2O, N2, NH3, Ar, He, O2, CF4&O2 |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/d322f3bd2f2493231718ced671ee1ffd |
|---|---|
| Local ID: | d322f3bd2f2493231718ced671ee1ffd |
| Type: | equipment |
| Name: | FEI Nova NanoSEM 630 |
| Description: | Schottky field emitter with up to 100 nA 150 mm x 150 mm piezo driven stage Substrates up to 200mm can be loaded Ultra high resolution imaging under high and low vacuum High vacuum 1.0 nm @ 15kV and Low Vacuum 1.8 nm @ 3kV Non conducting substrates can be imaged without coatings Electrostatic beam blanker and ebl capability Several detectors including TLD, ETD, Helix, VCD, GAD Integrated CCD in chamber camera |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/d5573065c5f237b334260d76a074f8aa |
|---|---|
| Local ID: | d5573065c5f237b334260d76a074f8aa |
| Type: | equipment |
| Name: | Oxford Instruments Estelas 100 ICP RIE Deep Silicon Etch Tool |
| Description: | A 200 mm high density plasma tool with load-lock mainly used for deep Si etching using the Bosch process with silicon etch rates up to 30 µm/min. The tool is used for a range of MEMS, NEMS and silicon optoelectronic & nanoelectronic research. Gases: SF6, C4F8, N2, Ar, He, O2 Materials etched: Si and SOI (Bosch process, mixed process), Ge, SiGe |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/e145db900ece0dfc8ef183dc1ee164a0 |
|---|---|
| Local ID: | e145db900ece0dfc8ef183dc1ee164a0 |
| Type: | equipment |
| Name: | Suss Microtec MA6 |
| Description: | Maximum substrate size of 150 mm For samples below 75 mm: hard and vacuum contact modes For samples of 100 mm and above: proximity, hard and vacuum contact modes Top and back side alignment 350 W Hg lamp UV400 optics and i-line filters Motorised stage and focus Exposure controller for single or multiple exposures Chucks for bond alignment and silicon fusion applications |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/e567e2ac9316a4e42b5f324bec28d60a |
|---|---|
| Local ID: | e567e2ac9316a4e42b5f324bec28d60a |
| Type: | equipment |
| Name: | 10 GB/s and 40 GB/s Telecomm Testing Systems2 Pulsed Laser |
| Description: | Bit Error Rate Test: Advantest D3286 error detector with a D3186 pulse pattern generator. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/e5c4ac8da6d7e694b5b8d1161be7a7e1 |
|---|---|
| Local ID: | e5c4ac8da6d7e694b5b8d1161be7a7e1 |
| Type: | equipment |
| Name: | Vacuum hot plates and ovens |
| Description: | Vacuum hot plates, surface thermomenters and ovens are important for the application of resists and the development of resist patterns. This is particularly true for chemically amplified resists which commonly require a carefully controlled post exposure bake. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/ee2da122c3da76ba7666449d5a63d2dc |
|---|---|
| Local ID: | ee2da122c3da76ba7666449d5a63d2dc |
| Type: | equipment |
| Name: | S-parameter Test: 10 MHz to 110 GHz |
| Description: | Cascade Microtech Microchamber (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and Agilent VNA extenders. 100 kHz to 20 GHz Agilent analogue signal generators and oscilloscopes are available. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |
| Local URI: | http://id.equipment.data.ac.uk/item/fbff6b2bf0d44f891751a1988d81e56e |
|---|---|
| Local ID: | fbff6b2bf0d44f891751a1988d81e56e |
| Type: | equipment |
| Name: | Wide Bandwidth Oscilloscopes |
| Description: | Agilent DCA 86100C and Rohde and Schwarz RTO1012 wide bandwidth oscilloscopes. |
| Related Facility ID: | James Watt Nanofabrication Centre |
| Location: | http://en.wikipedia.org/wiki/Glasgow |
| Contact Name: | Professor Douglas Paul |
| Contact Email: | Douglas.Paul@ glasgow.ac.uk |
| Site Location: | University of Glasgow, Gilmorehill Campus |
| Building: | James Watt Building |
| Web Address: | http://www.jwnc.gla.ac.uk |
| Institution Name: | University of Glasgow |
| Institution URL: | http://www.gla.ac.uk |
| Institution Logo URL: | http://www.gla.ac.uk/0t4/generic/images/logo_print.gif |
| Datestamp: | 2019-06-16T00:05:33+01:00 |
| Approximate Coordinates: | 55.858 -4.259 |
| Corrections: | mailto:Linsey.Robertson@glasgow.ac.uk |