Zygo NV 5000 series non-contact scanning white light interferometer mated to Metro-Pro anaylsys software. For 3D surface analysys, charaterisation, quantification and metrology. Operational specification: Vertical scan range, 150 microns; Field of view, 0.14x0.11mm; Lateral resolution, 0.64 microns; Vertical resolution, 0.1 nm; Sample stage, 89mm x 203mm x 203 mm.
Part of Organization: Sustainable Design Research Centre.
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