Equipment Data Service

Search and discover

Royce Electronbeam Lithography Suite Srf168

Equipment

Royce: Electron-Beam Lithography Suite (SRF168)

Last updated: 17 Jul 2025

Equipment Data Service is a Jisc product

Support

Use our API Contact us

Information

Privacy Cookie policy Accessibility

User terms Data protection

We are a membership organisation, providing digital solutions for UK education and research.

Find out more at jisc.ac.uk

This work is licensed under the CC BY-NC-ND 4.0.

Read about using our content.